Request Repair for This Component.
Use the inquiry form to send us information about your component: part number, brief fault description, and details on previous service measures. Our engineers evaluate whether repair, refurbishment, retrofit, or replacement to OEM standards is the most economical solution.
SFI extends the lifetime of RF generators, power supplies, PCB boards, handling robots, motors, and plasma generators in ETCH, CVD, PVD, and IMPL processes. Learn more about our repair and refurbishment service on our service page.
Alternatively, browse our repair database directly for matching components.
Seriennummer
0190-13025-002
SUSTAINABILITY
Repair Instead of Replace: Lifetime Extension to OEM Standard.
Remote plasma sources (RPS), also referred to as remote plasma generators, generate reactive species for cleaning and deposition processes in ETCH, ASH, CVD and PVD. SFI provides independent, OEM-compliant repair and refurbishment of remote plasma sources, including documented testing of power and ignition parameters. Repair keeps proven sources in service rather than replacing them with new units.
All services are performed to OEM specifications within an ISO 9001:2015 certified quality management system, with documented test procedures and full traceability. SFI provides the statutory warranty under German law on repaired components; the specific terms are documented in each fixed-price quote.