Request Repair for This Component.
Use the inquiry form to send us information about your component: part number, brief fault description, and details on previous service measures. Our engineers evaluate whether repair, refurbishment, retrofit, or replacement to OEM standards is the most economical solution.
SFI extends the lifetime of RF generators, power supplies, PCB boards, handling robots, motors, and plasma generators in ETCH, CVD, PVD, and IMPL processes. Learn more about our repair and refurbishment service on our service page.
Alternatively, browse our repair database directly for matching components.
Seriennummer
SUSTAINABILITY
Repair Instead of Replace: Lifetime Extension to OEM Standard.
Wafer handling robots form the mechanical backbone of fab automation and are used across all process steps. SFI refurbishes and repairs wafer handling robots together with their controllers and drives, independently of the original manufacturer. Supported manufacturers include Brooks Automation, Kensington, Hine, Isel and Kawasaki. Refurbishment covers mechanical overhaul, replacement of worn components and documented functional testing.
All services are performed to OEM specifications within an ISO 9001:2015 certified quality management system, with documented test procedures and full traceability. SFI provides the statutory warranty under German law on repaired components; the specific terms are documented in each fixed-price quote.