Request Repair for This Component.
Use the inquiry form to send us information about your component: part number, brief fault description, and details on previous service measures. Our engineers evaluate whether repair, refurbishment, retrofit, or replacement to OEM standards is the most economical solution.
SFI extends the lifetime of RF generators, power supplies, PCB boards, handling robots, motors, and plasma generators in ETCH, CVD, PVD, and IMPL processes. Learn more about our repair and refurbishment service on our service page.
Alternatively, browse our repair database directly for matching components.
Seriennummer
71000052
SUSTAINABILITY
Repair Instead of Replace: Lifetime Extension to OEM Standard.
RF matches (matching networks) provide impedance matching between the RF generator and the plasma. SFI offers independent, OEM-compliant repair and refurbishment of RF matches and auto-tuners, including documented testing of tuning and matching performance under load. Supported manufacturers include MKS, Advanced Energy and ENI.
All services are performed to OEM specifications within an ISO 9001:2015 certified quality management system, with documented test procedures and full traceability. SFI provides the statutory warranty under German law on repaired components; the specific terms are documented in each fixed-price quote.