Request Repair for This Component.
Use the inquiry form to send us information about your component: part number, brief fault description, and details on previous service measures. Our engineers evaluate whether repair, refurbishment, retrofit, or replacement to OEM standards is the most economical solution.
SFI extends the lifetime of RF generators, power supplies, PCB boards, handling robots, motors, and plasma generators in ETCH, CVD, PVD, and IMPL processes. Learn more about our repair and refurbishment service on our service page.
Alternatively, browse our repair database directly for matching components.
Seriennummer
Cesar1312
SUSTAINABILITY
Repair Instead of Replace: Lifetime Extension to OEM Standard.
RF generators are among the most critical components in plasma-based semiconductor processes such as ETCH, ASH, CVD, PVD and ion implant. SFI provides independent, OEM-compliant repair and refurbishment of RF generators — with full-load functional testing and documented test protocols. The most common frequency range is 13.56 MHz; 27 MHz and 2 MHz systems are also serviced. Supported manufacturers include MKS, Advanced Energy, ENI, Comdel and Daihen.
All services are performed to OEM specifications within an ISO 9001:2015 certified quality management system, with documented test procedures and full traceability. SFI provides the statutory warranty under German law on repaired components; the specific terms are documented in each fixed-price quote.