Request Repair for This Component.
Use the inquiry form to send us information about your component: part number, brief fault description, and details on previous service measures. Our engineers evaluate whether repair, refurbishment, retrofit, or replacement to OEM standards is the most economical solution.
SFI extends the lifetime of RF generators, power supplies, PCB boards, handling robots, motors, and plasma generators in ETCH, CVD, PVD, and IMPL processes. Learn more about our repair and refurbishment service on our service page.
Alternatively, browse our repair database directly for matching components.
Seriennummer
T61105-55/22T005-01
SUSTAINABILITY
Repair Instead of Replace: Lifetime Extension to OEM Standard.
Motors and drive components operate under heavy load across all process steps in semiconductor equipment. SFI repairs and refurbishes motors and their associated controllers independently and OEM-compliant — with diagnosis, replacement of wear parts and documented functional testing, so the component again meets its original specifications.
All services are performed to OEM specifications within an ISO 9001:2015 certified quality management system, with documented test procedures and full traceability. SFI provides the statutory warranty under German law on repaired components; the specific terms are documented in each fixed-price quote.