MKS Astex Ozone Generator AX8200

Use the inquiry form to send us information about your component: part number, brief fault description, and details on previous service measures. Our engineers evaluate whether repair, refurbishment, retrofit, or replacement to OEM standards is the most economical solution.

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SFI extends the lifetime of RF generators, power supplies, PCB boards, handling robots, motors, and plasma generators in ETCH, CVD, PVD, and IMPL processes. Learn more about our repair and refurbishment service on our service page. 
Alternatively, browse our repair database directly for matching components.